In this respect, the sensitivity variation as a function of the film thickness, controlled by the immersions number, the propane concentration, and the operation temperature of gas sensor, has been studied in this work.It is worthy of note that sol-gel deposition efficiency surpasses other chemical techniques, decreasing the waste of reactants; moreover, the set-up does not require an expensive vacuum system for synthesis. Hence, by the sol-gel technique, low cost manufacturing of ZnO thin films can be guaranteed. Additionally, ZnO-based sensors obtained by this technique present high sensitivity, low cost, fast response rate, and easy synthesis.2.?Experimental Procedure2.1.
Films PreparationThe ZnO:Ru and ZnO:Cr thin solid films were prepared by the sol-gel method based on a non-alkoxide route.
The coating solution was prepared from zinc acetate dehydrated (Zn(C2H3O2)2?2H2O, Alfa Aesar, 98%) dissolved in a mixture of 2-methoxyethanol (CH3OCH2CH2OH, Sigma-Aldrich, 98%) and monoethanolamine (MEA, (CH2CH2OH)NH2, Sigma-Aldrich, 98%) at a molar concentration of 0.6 M. The solution was stirred at room temperature during one hour until a homogeneous and transparent solution was obtained. Ruthenium (III) trichloride (RuCl3, Alfa, 98%) and chromium (III) acetylacetonate (C15H21CrO6, Alfa, Dacomitinib 98%) dissolved in deionized water (H2O) were used as doping sources.The ZnO:Ru and ZnO:Cr thin films were deposited on clean soda-lime glass substrates (2.
5 Carfilzomib cm �� 2.5 cm) by a repeated dip-coating process, at room temperature.
The following cleaning procedure was used: a five minutes washing in trichloroethylene (C2HCl3, Baker, 98%) to degrease the substrate, followed by five minutes in acetone (CH3COCH3, Baker, 98%), then five minutes in methyl alcohol (CH3OH, Baker, 98%), and finally, a drying under a nitrogen flow (N2, Praxair, 99%). All washing steps were carried out in an ultrasonic water bath.In order to remove the residual solvents after every immersion, an annealing process, in air at 200 ��C for 10 min, was carried out. Additionally, in order to diffuse the Cr or Ru into the films, an extra annealing process was performed at 450 ��C in air for one 1 h. The films thickness was controlled by the immersions number; in this work, 6 immersions for all ZnO films, and one, three, and five immersions for the doping process, were used. Undoped ZnO films were deposited for comparison with the doped ZnO films, in order to analyze the effect of the doping elements (Cr and Ru) on the sensing properties.2.2.
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