LK participated in the design of the experiment. XW carried out the first principle calculation and
revised the manuscript. WL proposed the initial work, supervised the experimental work, and revised the manuscript. PP and JH participated in TEM imaging and image analysis. All authors read and approved the final manuscript.”
“Background Since Terry’s first report in 1979 [1], micro-fabricated gas chromatography (GC) columns have been developed for over 30 years. The new generation OSI-906 price of GC columns has unique characteristics. Silicon is often used as a substrate for column fabrication. These GC columns come in small sizes with high-column efficiency [2] and differ significantly from packed or capillary columns, which are made of steel or silica [3, 4]. Thus, micro-fabricated columns selleck chemical are suitable for applications in hand-held GC systems [5]. The structure of the GC column varies when fabricated via microelectromechanical system (MEMS) processes. For instance, since the depth and width of columns can be arbitrarily designed, the column structure can feature different aspect ratios. These flexibilities provide a new direction for
research in this field. Over the past 30 years, techniques for column fabrication have changed significantly. Wet etching was an important technique in early fabrication techniques [6]. In 1998, Sandia National Laboratories reported the application of wet etching process to fabricate single CH5183284 clinical trial open-tube columns with rectangular channels [7]. However, precise 5-Fluoracil regulation of concentrations and temperatures of etching solution were important factors that influenced structure formation. The chemical wet etching technique has not found widespread use because of its lack of control over the structure. To allow for better control of the column shape, the deep reactive-ion etching (DRIE) technique was developed. This technique prevents lateral etching of the silicon and
results in highly anisotropic etch profiles at high etch rates [8]. Etching capabilities can vary from <1 μm to >700 μm in depth in vertical sidewalls [9]. Considering its many advantages, DRIE has become the workhorse of column fabrication. Since the 9/11 attack, acts of terrorism have become a matter of significant concern to many countries. Chemical warfare agents (CWAs) constitute one class of such lethal weapons for potential use by terrorists. Rapid separation and identification of lethal gas in public space is a great challenge, especially in airports and subways. Previously, researchers have shown that micro-fabricated GC columns can separate the components of a mixture in a complex environment [10, 11]. For instance, MEMS-based semi-packed GC columns can separate environmental carcinogens with concentrations at the ppb level [12] with higher separation efficiency than commercial GC columns, and the total length of the GC column is only 2-m long.
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